Epitaxial growth of spinel cobalt ferrite films on MgAl2O4 substrates by direct liquid injection chemical vapor deposition
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چکیده
منابع مشابه
Direct-liquid-evaporation chemical vapor deposition of smooth, highly conformal cobalt and cobalt nitride thin films
By a direct-liquid-evaporation chemical vapor deposition (DLE-CVD) method, we deposited smooth lowresistance cobalt (Co) and cobalt nitride (CoxN) thin films with excellent conformality at low temperatures down to 200 1C. In the DLE process, a cobalt amidinate precursor solution, bis(N,N0-diisopropylacetamidinato)cobalt(II) dissolved in tetradecane, was vaporized as it flowed smoothly, without ...
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ژورنال
عنوان ژورنال: Journal of Crystal Growth
سال: 2014
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2013.12.012